Published April 2011 | Version v1
Journal article Metadata-only

Effect of performance of Zr-Y alloy target on thin film deposition technology

Creators

  • 1. National Key Laboratory for Nuclear Fuel and Materials, Nuclear Power Institute of China, Chengdu (China)

Description

Yttria-stabilized zirconia (YSZ) films are synthesized on corrosion resistant plates by pulsed bias arc ion plating. The arc starting performance and the stability of thin film deposition is explored by improving the uniformity and compactibility of Zr-Y alloy target. The property of Zr-Y alloy target and depositional thin films were measured with the optical microscope, scanning electron microscope, X-ray diffractometer. The result shows that the target with hot rolling and annealing has a good arc starting performance and stability of thin film deposition, and the depositional thin films made of Yttria and amorphous zirconia are homogeneous and compact. (authors)

Additional details

Publishing Information

Journal Title
Nuclear Power Engineering
Journal Volume
32
Journal Issue
2
Journal Page Range
p. 25-29
ISSN
0258-0926

INIS

Country of Publication
China
Country of Input or Organization
China
INIS RN
45102596
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ANNEALING; CORROSION RESISTANCE; ION BEAM TARGETS; OPTICAL MICROSCOPES; PERFORMANCE; PLATES; PLATING; PULSES; ROLLING; SCANNING ELECTRON MICROSCOPY; STABILITY; THIN FILMS; X-RAY DIFFRACTOMETERS; YTTRIUM OXIDES; ZIRCONIUM ALLOYS; ZIRCONIUM OXIDES
Descriptors DEC
ALLOYS; CHALCOGENIDES; DEPOSITION; DIFFRACTOMETERS; ELECTRON MICROSCOPY; FABRICATION; FILMS; HEAT TREATMENTS; MATERIALS WORKING; MEASURING INSTRUMENTS; MICROSCOPES; MICROSCOPY; OXIDES; OXYGEN COMPOUNDS; SURFACE COATING; TARGETS; TRANSITION ELEMENT ALLOYS; TRANSITION ELEMENT COMPOUNDS; YTTRIUM COMPOUNDS; ZIRCONIUM COMPOUNDS

Optional Information

Notes
10 figs., 4 tabs., 2 refs.