Published 1989
| Version v1
Miscellaneous
Fabrication of ultrathin monocrystalline silicon film and measurement of its parameters
Creators
Description
Short note. 1 ref
Additional details
Additional titles
- Original title (Russian)
- Получение ультратонкой монокристаллической пленки кремния и измерение ее параметеров
Publishing Information
- Imprint Title
- Summaries of reports of 19. All-union conference on physics of charged particles interaction with crystals
- Imprint Pagination
- 192 p.
- Journal Page Range
- p. 77.
- Report number
- INIS-SU--144/A
Conference
- Title
- 19. All-union conference on physics of charged particles interaction with crystals.
- Dates
- 29-31 May 1989.
- Place
- Moscow (USSR).
INIS
- Country of Publication
- USSR
- Country of Input or Organization
- USSR
- INIS RN
- 21018099
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- ARGON IONS; CRYSTAL STRUCTURE; FABRICATION; KEV RANGE 01-10; MONOCRYSTALS; SILICON; SPUTTERING; THICKNESS; THIN FILMS
- Descriptors DEC
- CHARGED PARTICLES; CRYSTALS; DIMENSIONS; ELEMENTS; ENERGY RANGE; FILMS; IONS; KEV RANGE; SEMIMETALS
Optional Information
- Notes
- Imprint:Tezisy dokladov 19. Vsesoyuznogo soveshchaniya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami.