Published March 1987 | Version v1
Journal article Metadata-only

Effect of oxygen ion implantation on the composition of molybdenum surface layers

Creators

  • 1. Moskovskij Inst. Tonkoj Khimicheskoj Tekhnologii (USSR)

Description

X-ray electron and Auger electron spectroscopy with ion sputtering are used to study chemical and phase composition changes induced by oxygen ion implantation in molybdenum surface layers. Implanted oxygen is found to appear in molybdenum matrix as the oxide MoO2 and as solid solution. MoO2 quantity and depth distribution are shown to largely depend on implantation doses and energies

Additional details

Additional titles

Original title (Russian)
Влияние ионной имплантации кислорода на состав повехностных слоев молибдена

Publishing Information

Journal Title
Poverkhn.: Fiz., Khim., Mekh.
Journal Issue
no.3
Series
Poverkhn.: Fiz., Khim., Mekh.
CODEN
PFKMD

INIS

Country of Publication
USSR
Country of Input or Organization
USSR
INIS RN
19016991
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
AUGER EFFECT; ELECTRON SPECTRA; ION IMPLANTATION; KEV RANGE 10-100; MOLYBDENUM; MONOCRYSTALS; OXYGEN IONS; PHASE STUDIES; PHYSICAL RADIATION EFFECTS; RADIATION DOSES; SURFACES; X-RAY SPECTRA
Descriptors DEC
CHARGED PARTICLES; CRYSTALS; ELEMENTS; ENERGY RANGE; IONS; KEV RANGE; METALS; RADIATION EFFECTS; SPECTRA; TRANSITION ELEMENTS