Metal-organic chemical vapour deposition of mixed-conducting perovskite oxide layers on monocrystalline and porous ceramic substrates

Perovskite oxide layers, i.e. manganites La1-x(Sr,Ca)xMnO3, ferrates La1-xSrxFe1-yCoyO3, gallates La1-xSrxGa1-y(Co,Ni,Fe)yO3 of a thickness of 0.8-2 μm, were deposited by pulsed injection MOCVD (metal-organic chemical vapour deposition) on various monocrystalline and porous ceramic substrates. The layers were characterised by X-ray diffraction, scanning electron microscopy, wavelength dispersion spectroscopy and by electrical measurements of the total conductivity vs. temperature. Such oxides are known as mixed electronic-ionic conductors and are largely studied as materials for the fabrication of oxygen permeable membranes. One of the aims of this work was to estimate the suitability of the pulsed injection MOCVD technique for the preparation of dense perovskite layers for their use as membranes for oxygen