Published March 2013 | Version v1
Journal article Metadata-only

Effect of temperature on the electrical properties of ITO in a TiO2/ITO film

Creators

  • 1. Shimane Institute for Industrial Technology, 1 Hokuryo, Matsue, Shimane 690-0816 (Japan)
  • 2. Interdisciplinary Faculty of Science and Engineering, Shimane University, 1060 Nishikawatsu, Matsue, Shimane 690-8504 (Japan)

Description

Thermal stabilities of indium tin oxide (ITO) substrates and TiO2/ITO structures were evaluated in relation to their electrical properties. The ITO substrates and TiO2/ITO structures were annealed at 350, 400, and 500 C. The ITO substrate with large grain size showed higher thermal stability than that with small grain size. The thermal stability of TiO2/ITO structure improved with increasing TiO2 thickness, and a decrease in electron concentration was observed in resistance-increased samples. These changes were attributed to variations in grain-boundary potential caused by oxygen adsorption. It may be concluded that variation of the grain-boundary potential by thermal annealing has a dominant influence on resistance. Therefore, optimization of the grain size is important to improve the thermal stability of ITO. This mechanism and procedure can be applied to improve the characteristics of other TCO materials. (Copyright copyright 2013 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim)

Availability note (English)

Available from: http://dx.doi.org/10.1002/pssa.201228325

Additional details

Identifiers

DOI
10.1002/pssa.201228325;

Publishing Information

Journal Title
Physica Status Solidi. A, Applications and Materials Science
Journal Volume
210
Journal Issue
3
Journal Page Range
p. 589-593
ISSN
1862-6300

INIS

Country of Publication
Germany
Country of Input or Organization
Germany
INIS RN
44050952
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ABSORPTION SPECTRA; ADSORPTION; ANNEALING; ELECTRIC CONDUCTIVITY; ELECTRON DENSITY; GRAIN BOUNDARIES; GRAIN SIZE; HALL EFFECT; INDIUM OXIDES; INFRARED SPECTRA; MORPHOLOGY; OPACITY; OXYGEN; STABILITY; TEMPERATURE DEPENDENCE; TEMPERATURE RANGE 0400-1000 K; THICKNESS; THIN FILMS; TITANIUM OXIDES
Descriptors DEC
CHALCOGENIDES; DIMENSIONS; ELECTRICAL PROPERTIES; ELEMENTS; FILMS; HEAT TREATMENTS; INDIUM COMPOUNDS; MICROSTRUCTURE; NONMETALS; OPTICAL PROPERTIES; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SIZE; SORPTION; SPECTRA; TEMPERATURE RANGE; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS

Optional Information

Notes
With 5 figs., 2 tabs., 13 refs.