Published 1973
| Version v1
Report
Restricted
Characterization of silicon metallization systems using energetic ion backscattering
Description
no abstract available
Availability note (English)
MF available from INIS under the Report Number.
Files
Restricted
The record is publicly accessible, but files are restricted to users with access.
Additional details
Publishing Information
- Imprint Pagination
- 35 p.
- Report number
- SLA--73-5760
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 5127072
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ALUMINIUM; BACKSCATTERING; COATINGS; DIFFUSION; FILMS; GOLD; ION BEAMS; ION SCATTERING ANALYSIS; NONDESTRUCTIVE TESTING; SILICON; SPRAY COATING; THICKNESS
- Descriptors DEC
- BEAMS; CHEMICAL ANALYSIS; DEPOSITION; DIMENSIONS; ELEMENTS; MATERIALS TESTING; METALS; NONDESTRUCTIVE ANALYSIS; SCATTERING; SEMIMETALS; SURFACE COATING; TESTING; TRANSITION ELEMENTS