Published September 1, 2018 | Version v1
Journal article

Application of forward five point central difference method in the temperature field model of laser processing silicon wafer

  • 1. School of Mechanical and Electrical Engineering, Guilin University of Electronic Technology, Guilin, 541004 (China)

Description

This paper develops an analysis of ultimate capacity of hot-rolled RHS and SHS, Traditional laser processing of silicon wafers usually uses phase transition method to remove materials, resulting in melting material resorting to overheated temperature and forming recast layer after cooling, which will affect the processing quality and material properties. This paper is Based on water jet assisted laser machining and the thought of energy balance, and apply prior to the central five point difference scheme to structure two dimensional transient temperature field model around cutting groove during the process of water jet assisted laser machining. At the same time, it will verify the applicability of the numerical model according to comparing the temperature field and the experimental results. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1742-6596/1087/2/022002

Additional details

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
1087
Journal Issue
2
Journal Page Range
[7 p.]
ISSN
1742-6596

Conference

Title
1. International Conference on Advanced Algorithms and Control Engineering
Dates
10-12 Aug 2018
Place
Pingtung, Taiwan (China)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
53023481
Subject category
S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
CAPACITY; COOLING; CUTTING; ENERGY BALANCE; JETS; LASER BEAM MACHINING; LASERS; LAYERS; MATERIALS; MELTING; SILICON; TRANSIENTS
Descriptors DEC
ELEMENTS; MACHINING; PHASE TRANSFORMATIONS; SEMIMETALS