Published March 1998 | Version v1
Journal article Metadata-only

CVD processes for coatings and surface modifications

Creators

  • 1. Technische Univ. Braunschweig (Germany). Inst. fuer Oberflaechentechnik und Plasmatechnische Werkstoffentwicklung

Description

Chemical vapour deposition (CVD) has a number of important properties, but due to engineering problems CVD is not usually used in industrial applications. In this article these problems are discussed by the following examples: superconductor deposition and heat barrier deposition in a band evaporator; and SiOxCy coatings on polymers produced by photo processes. Treatment in a corona discharge shows barrier effects at these coatings. (orig.)

Additional details

Publishing Information

Journal Title
Surface and Coatings Technology
Journal Volume
100-101
Journal Issue
1-3
Journal Page Range
p. 132-141
ISSN
0257-8972
CODEN
SCTEEJ

Conference

Title
International conference on advanced materials (ICAM '97) - Spring meeting of the European Research Society (E-MRS) and exhibition
Dates
16-20 Jun 1997
Place
Strasbourg (France)

INIS

Country of Publication
Netherlands
Country of Input or Organization
Switzerland
INIS RN
29041689
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
BARIUM OXIDES; CHEMICAL VAPOR DEPOSITION; COMPARATIVE EVALUATIONS; COPPER OXIDES; CORONA DISCHARGES; DIFFUSION BARRIERS; HIGH-TC SUPERCONDUCTORS; INFRARED SPECTRA; PHOTOCHEMISTRY; POLYMERS; PROTECTIVE COATINGS; SCANNING ELECTRON MICROSCOPY; SILICON OXIDES; STOICHIOMETRY; THERMAL INSULATION; ULTRAVIOLET SPECTRA; X-RAY DIFFRACTION; YTTRIUM OXIDES
Descriptors DEC
ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; CHALCOGENIDES; CHEMICAL COATING; CHEMISTRY; COATINGS; COHERENT SCATTERING; COPPER COMPOUNDS; DEPOSITION; DIFFRACTION; ELECTRIC DISCHARGES; ELECTRON MICROSCOPY; EVALUATION; MICROSCOPY; OXIDES; OXYGEN COMPOUNDS; SCATTERING; SILICON COMPOUNDS; SPECTRA; SUPERCONDUCTORS; SURFACE COATING; TRANSITION ELEMENT COMPOUNDS; YTTRIUM COMPOUNDS

Optional Information

Notes
41 refs.