Development and vacuum characterization of the non evaporable getter coated aluminum chamber

Non-Evaporable Getter (NEG) coating is an efficient method of pumping for the accelerators. It is very useful for evacuating the conductance limited insertion device chambers. In our experiments, Ti- Zr-V film has been deposited onto the inner face of the extruded aluminium-alloy pipes with elliptical profile. The chamber cross-section is 86mm x 36mm with 400mm length. Due to the elliptical profile, double target assembly was used for coating. DC magnetron sputtering system was used for coating this low gap elliptical chamber. This paper presents the target assembly, film deposition, and preliminary vacuum performance -ultimate vacuum and RGA analysis. Samples have been investigated by Scanning Electron Microscope (SEM), Profilometer and XRF to determine film structure, thickness and composition respectively. (author)