Published January 28, 2016 | Version v1
Journal article

Laboratory-size three-dimensional water-window x-ray microscope with Wolter type I mirror optics

  • 1. The Graduate School for the Creation of New Photonics Industries, 1955-1 Kurematsu-cho, Nishi-ku, Hamamatsu-City, 431-1202 (Japan)
  • 2. Hamamatsu Photonics K.K., 5000 Hirakuchi, Hamakita-ku, Hamamatsu-City, 434-8601 (Japan)
  • 3. Ray-Focus Co. Ltd., 6009 Shinpara, Hamakita-ku, Hamamatsu-City, 434-0003 (Japan)
  • 4. Research Center for Advanced Science and Technology, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8904 (Japan)

Description

We constructed a laboratory-size three-dimensional water-window x-ray microscope that combines wide-field transmission x-ray microscopy with tomographic reconstruction techniques. It consists of an electron-impact x-ray source emitting oxygen Kα x-rays, Wolter type I grazing incidence mirror optics, and a back-illuminated CCD for x-ray imaging. A spatial resolution limit better than 1.0 line pairs per micrometer was obtained for two-dimensional transmission images, and 1-μm-scale three-dimensional fine structures were resolved

Additional details

Identifiers

Publishing Information

Journal Title
AIP Conference Proceedings
Journal Volume
1696
Journal Issue
1
Journal Page Range
p. 020009-020009.4
ISSN
0094-243X
CODEN
APCPCS

Conference

Title
12. international conference on X-ray microscopy
Acronym
XRM 2014
Dates
26-31 Oct 2014
Place
Melbourne (Australia)

Optional Information

Notes
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