Toward Rapid Unattended X-ray Tomography of Large Planar Samples at 50-nm Resolution

X-ray tomography at sub-50 nm resolution of small areas (∼15 μmx15 μm) are routinely performed with both laboratory and synchrotron sources. Optics and detectors for laboratory systems have been optimized to approach the theoretical efficiency limit. Limited by the availability of relatively low-brightness laboratory X-ray sources, exposure times for 3-D data sets at 50 nm resolution are still many hours up to a full day. However, for bright synchrotron sources, the use of these optimized imaging systems results in extremely short exposure times, approaching live-camera speeds at the Advanced Photon Source at Argonne National Laboratory near Chicago in the US These speeds make it possible to acquire a full tomographic dataset at 50 nm resolution in less than a minute of true X-ray exposure time. However, limits in the control and positioning system lead to large overhead that results in typical exposure times of ∼15 min currently.We present our work on the reduction and elimination of system overhead and toward complete automation of the data acquisition process. The enhancements underway are primarily to boost the scanning rate, sample positioning speed, and illumination homogeneity to performance levels necessary for unattended tomography of large areas (many mm2 in size). We present first results on this ongoing project.