Signal detection
Creators
- 1. Universite Claude Bernard LYON 1, 69 - Villeurbanne (France). Dept. de Physique des Materiaux
Description
In a scanning electron microscope, whatever is the measured signal, the same set is found: incident beam, sample, signal detection, signal amplification. The resulting signal is used to control the spot luminosity with the observer cathodoscope. This is synchronized with the beam scanning on the sample; on the cathodoscope, the image in secondary electrons, backscattered electrons,... of the sample surface is reconstituted. The best compromise must be found between a register time low enough to remove eventual variations (under the incident beam) of the nature of the observed phenomenon, and a good spatial resolution of the image and a signal-to-noise ratio high enough. The noise is one of the basic limitations of the scanning electron microscope performance. The whose measurement line must be optimized to reduce it
Abstract (French)
Dans un microscope electronique a balayage, quel que soit le signal mesure on retrouve le meme synoptique: faisceau incident, echantillon, detection du signal, amplification du signal. Le signal resultant est utilise pour controler la luminosite du spot sur le cathodoscope d'observation. Ceci est fait en synchronisme ave le balayage du faisceau sur l'echantillon. On reconstitue ainsi sur le cathodoscope l'image en electrons secondaires, retrodiffuses, etc... de la surface de l'echantillon. L'experimentateur desire trouver le meilleur compromis entre une duree d'enregistrement suffisamment faible pour s'affranchir des variations eventuelles, sous l'effet du faisceau d'electrons incidents, de la nature du phenomene observe, une bonne resolution spatiale de l'image et un rapport signal/bruit suffisamment eleve. Le bruit represente une des limitations fondamentales des performances d'un microscope electronique a balayage. Aussi l'ensemble de la chaine de mesure doit etre optimise en vue de le reduire. L'element determinant de cette chaine est l'element d'entree ou detecteur. Ce dernier assure la ''conversion'' de tout ou partie de l'energie cinetique incidente (particules ou rayonnement) en signal electriqueAdditional details
Additional titles
- Original title (French)
- Detection des signaux
- Augmented title (English)
- In scanning electron microscopes
Publishing Information
- Publisher
- Les Editions de Physique.
- Imprint Place
- Orsay (France)
- ISBN
- 2-900-19507-1
- Imprint Title
- Practice of the scanning electron microscope
- Imprint Pagination
- 204 p.
- Journal Page Range
- p. C.1-C.22.
Conference
- Title
- Summer school on microanalysis and scanning electron microscopy.
- Dates
- 11-16 Sep 1978.
- Place
- Saint-Martin-d'Heres (France).
INIS
- Country of Publication
- France
- Country of Input or Organization
- France
- INIS RN
- 18052859
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ELECTRON DETECTION; ELECTRON MICROSCOPES; NOISE; PHOTOMULTIPLIERS; SCANNING ELECTRON MICROSCOPY; SCINTILLATION COUNTERS; SIGNAL-TO-NOISE RATIO; SIGNALS
- Descriptors DEC
- CHARGED PARTICLE DETECTION; DETECTION; ELECTRON MICROSCOPY; MEASURING INSTRUMENTS; MICROSCOPES; MICROSCOPY; PHOTOTUBES; RADIATION DETECTION; RADIATION DETECTORS
Optional Information
- Notes
- Imprint:Pratique du microscope electronique a balayage.