On the Determination of Coating Thicknesses by μXRF

The micro-X-Ray fluorescence method (μ-XRF) is traditionally used for local elemental analysis, as well as for studying the distribution of chemical elements on the surface of inhomogeneous objects [1]. Mapping of the sample surface is carried out simultaneously with the study of its topography using microscopic images obtained with a digital camera built into the μ-XRF spectrometer. With its help the X-Ray probe is positioned on the surface of the analyzed sample. However, monocular optical images cannot be used to reliably judge the morphology of its surface. Realization of this procedure in the mode of surface mapping by μ-XRF method allows to estimate the homogeneity of the coating, uniformity of its thickness distribution. Application of easily removable coating with a flat surface on the analyzed sample gives its topographically accurate replica for relief restoration in the mapping mode. The purpose of the work is to consider the principal possibility and prospects of application of this method in practice.