Published October 1992
| Version v1
Journal article
Structural investigation of diamond thin films synthesized by dual ion beam deposition
- 1. Tsinghua Univ., Beijing (China). Dept. of Materials Science and Engineering
Description
The formation of diamond thin films synthesized by dual ion beam deposition at room temperature is presented. The carbon films deposited by ion beam sputtering were simultaneously bombarded by Ar+ with energies of 2-25 keV. The synthesized carbon films were characterized by TEM, AES, and XPS. Structural analyses show that the carbon films synthesized by ion beam deposition at room temperature exhibit clear diamond character. (author)
Additional details
Publishing Information
- Journal Title
- Vacuum
- Journal Volume
- 43
- Journal Issue
- 10
- Journal Page Range
- p. 945-947.
- ISSN
- 0042-207X
- CODEN
- VACUAV
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- United Kingdom
- INIS RN
- 24009565
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ARGON IONS; CARBON; DEPOSITION; DIAMONDS; ION BEAMS; KEV RANGE 10-100; SPUTTERING; STRUCTURAL CHEMICAL ANALYSIS; TEMPERATURE RANGE 0273-0400 K; THIN FILMS
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; ELEMENTS; ENERGY RANGE; FILMS; IONS; KEV RANGE; MINERALS; NONMETALS; TEMPERATURE RANGE