Pulsed X irradiation annealing of defects

Possibility to use pulsed X radiation for defect annealing is considered. Advantage of X radiation over laser radiation is in selective effect on multilayer structures consisting of light and heavy materials. X radiation has one more advantage: possibility to effect on depth layers without any effect on the surface. Besides, if it is necessary, one can form amorphous layers, change considerably an electron structure of surface layers affecting the surface by high X radiation