Published October 16, 1983 | Version v1
Journal article

The influence of cesium implanted in silicon on the secondary ion emission

  • 1. Humboldt-Universitaet, Berlin (German Democratic Republic). Sektion Physik

Description

The dependence of ion emission on the cesium concentration (N/sub Cs/) at the surface of Si has been studied by dynamic SIMS and ion microscopy. N-type silicon crystals were implanted with 133Cs+ ions at 120 keV and different doses to change N/sub Cs/. The depth profiles of Cs implantations were measured together with the corresponding negative and positive silicon and silicon cluster emission by the aid of an ion microscope. A qualitative agreement between the cesium distribution and the silicon ion emission is shown

Additional details

Publishing Information

Journal Title
Phys. Status Solidi A
Journal Volume
79
Journal Issue
2
Series
Phys. Status Solidi A.
Journal Page Range
K193-K196
ISSN
0031-8965

Optional Information

Notes
Short note.