Published 2010
| Version v1
Miscellaneous
Ion-beam system for nanotrimming of functional microelectronics layers
Creators
- 1. Karazin Kharkiv National University, Kharkiv (Ukraine)
- 2. Moscow State Aviation Technological University, Moscow (Russian Federation)
Description
no abstract available
Additional details
Publishing Information
- Imprint Place
- Kharkiv (Ukraine)
- Imprint Title
- Plasma Physics and Controlled Fusion; Role of Electric Fields in Plasma Confinement in Stellarators and Tokamaks. Alushta-2010. Book of Abstracts
- Imprint Pagination
- 215 p.
- Journal Page Range
- p. 148
- Report number
- INIS-UA--172
Conference
- Title
- 4. International Conference-School and International Workshop
- Dates
- 13-18 Sep 2010
- Place
- Alushta (Ukraine)
INIS
- Country of Publication
- Ukraine
- Country of Input or Organization
- Ukraine
- INIS RN
- 43058740
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference, No Abstract, Non-conventional Literature
- Descriptors DEI
- ANODES; BEAM-PLASMA SYSTEMS; ETCHING; ION BEAMS; ION SOURCES; LAYERS; SURFACE PROPERTIES; TOPOGRAPHY
- Descriptors DEC
- BEAMS; ELECTRODES; SURFACE FINISHING