Published 1977
| Version v1
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Principles of electron backscattering by solids and thin films
Description
The parameters concerning the electron backscattering from thin films and solids (atomic scattering cross-section, atomic number, single/multiple scattering, film thickness of self-supporting films and of surface films on bulk substrates, scattering angular distribution, angle of incidence, diffraction effects) are described. Their influence on some important contrast mechanisms in scanning electron microscopy (thickness contrast, Z/material contrast, tilting/topography contrast, orientation contrast) is discussed. The main backscattering electron detection systems are briefly described. (orig.)
Availability note (English)
MF available from INIS under the Report Number.Abstract (German)
Es werden die Einflussgroessen auf die Elektronenrueckstreuung von Festkoerperschichten (Atomstreuquerschnitt, Ordnungszahl, Einfach-/Vielfachstreuung, Schichtdicke freitragender und von Oberflaechen-Schichten, Streuwinkelverteilung, Inzidenzwinkel, Beugungseffekte) dargestellt und ihre Wirkung auf einige wichtige Kontrastarten (Dickenkontrast, Z-/Material-Kontrast, Neigungs-/Topographie-Kontrast, Orientierungskontrast) im Abtastelektronenmikroskop sowie die wichtigsten Rueckstreuelektronen-Detektionsarten erlaeutert. (orig.)
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Additional details
Additional titles
- Original title (German)
- Grundlagen der Elektronenrueckstreuung an Festkoerpern und duennen Schichten
Publishing Information
- Imprint Pagination
- 18 p.
- Report number
- AED-Conf--77-283-004
Conference
- Title
- 18. conference on electron microscopy and 10. colloquium of the Arbeitskreis fuer Elektronenmikroskopische Direktabbildung und Analyse von Oberflaechen (EDO) and international conference on microprobe analysis in biology and medicine.
- Dates
- 4 - 9 Sep 1977.
- Place
- Muenster, Germany, F.R.
INIS
- Country of Publication
- Germany
- Country of Input or Organization
- Germany
- INIS RN
- 9356552
- Subject category
- S73: NUCLEAR PHYSICS AND RADIATION PHYSICS;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ANGULAR DISTRIBUTION; BACKSCATTERING; ELECTRON BEAMS; ELECTRON DETECTION; ELECTRON DIFFRACTION; ELECTRON SCANNING; FILMS; IMAGES; MULTIPLE SCATTERING
- Descriptors DEC
- BEAMS; CHARGED PARTICLE DETECTION; COHERENT SCATTERING; DIFFRACTION; DISTRIBUTION; LEPTON BEAMS; PARTICLE BEAMS; RADIATION DETECTION; SCATTERING
Optional Information
- Notes
- 24 figs.; 120 refs.