A computationally simple method for simulating the micro-embossing of thermoplastic layers
- 1. Microsystems Technology Laboratories, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Room 39-328, Cambridge, MA 02139 (United States)
- 2. Department of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore 639798 (Singapore)
Description
We demonstrate a highly computationally efficient approach to simulating the embossing of micrometer-scale, feature-rich patterns on to thermoplastic polymeric layers. The method employs a linear viscoelastic model for the embossed layer and computes the distribution of contact pressure between the polymeric layer and a rigid embossing stamp that is consistent with the progression of the polymer deformation. An approximation to the embossed topography of the polymeric layer is thereby generated as a function of the material being embossed, the stamp's design, and the embossing process's temperature, duration and applied load. For a stamp design described with an 800 × 800 matrix of topographical heights, simulation can be completed within 30–100 s using a personal computer with an Intel Pentium 4 processor and 2 GB RAM. Our method is sufficiently fast for it to be employed iteratively for designing a pattern to be embossed or for selecting processing parameters. The viscoelastic properties of three polymeric materials—polymethylmethacrylate, polycarbonate and Zeonor 1060R, a cyclic olefin polymer—have been experimentally calibrated. For a test pattern having features with diameters of 5 µm to 90 µm, simulated and experimental topographies agree with rms errors of less than 2 µm across all processing conditions tested, with absolute topographical heights ranging up to 30 µm
Availability note (English)
Available from http://dx.doi.org/10.1088/0960-1317/19/7/075007Additional details
Identifiers
- DOI
- 10.1088/0960-1317/19/7/075007;
- PII
- S0960-1317(09)09710-1;
Publishing Information
- Journal Title
- Journal of Micromechanics and Microengineering. Structures, Devices and Systems
- Journal Volume
- 19
- Journal Issue
- 7
- Journal Page Range
- [16 p.]
- ISSN
- 0960-1317
- CODEN
- JMMIEZ
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 45007798
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- APPROXIMATIONS; DEFORMATION; DESIGN; DISTRIBUTION; LAYERS; PERSONAL COMPUTERS; POLYCARBONATES; SIMULATION; THERMOPLASTICS; TOPOGRAPHY
- Descriptors DEC
- CALCULATION METHODS; CARBON COMPOUNDS; CARBONATES; COMPUTERS; DIGITAL COMPUTERS; MATERIALS; MICROCOMPUTERS; ORGANIC COMPOUNDS; ORGANIC POLYMERS; OXYGEN COMPOUNDS; PETROCHEMICALS; PETROLEUM PRODUCTS; PLASTICS; POLYMERS; SYNTHETIC MATERIALS