Recent developments in XPS

Although X-ray photoelectron spectroscopy (XPS) is at a point in its history at which a state of technological maturity has been reached, progress continues to be made on a number of aspects of this important surface analysis technique. Recent advances have included improved control over the depth sensitivity of XPS analyses, enhancements in XPS detection and computer systems, and higher spatial resolution. Current progress and prospects for XPS were reviewed at the 1986 Eastern Analytical Symposium by Cedric J. Powell, chief of the surface science division at the National Bureau of Standards. Powell spoke at a session on Modern Methods of Thin Film and Surface Analysis that was chaired by Richard J. Colton of the Naval Research Laboratory