Published June 3, 2014
| Version v1
Journal article
Fabrication of stable pn junction single-walled carbon nanotube thin films by position selective Cs plasma irradiation method
Creators
- 1. Department of Electronic Engineering, Tohoku University, 6-6-05 Aoba, Aramaki, Aoba-ku, Sendai 980-8579 (Japan)
Description
Stable n-type thin film transistors (TFTs) are fabricated with Cs encapsulated single-walled carbon nanotubes (Cs@SWNTs). The transport property of SWNTs-TFTs clearly changes from p- to n-type characteristic after the Cs plasma irradiation. Based on the systematic investigations, it is revealed that there is an optimum ion energy for the effective Cs encapsulation, which is around 50 eV. Furthermore, it is also found that the n-type feature is stable even in water and high temperature (< 400 °C) conditions. The pn junction structure is also realized by position selective doping of Cs. This very stable pn junction TFT is important for the practical application of SWNTs-based thin film electronics
Availability note (English)
Available from http://dx.doi.org/10.1088/1742-6596/518/1/012013Additional details
Identifiers
Publishing Information
- Journal Title
- Journal of Physics. Conference Series (Online)
- Journal Volume
- 518
- Journal Issue
- 1
- Journal Page Range
- [5 p.]
- ISSN
- 1742-6596
Conference
- Title
- 26. symposium on plasma sciences for materials
- Acronym
- SPSM26
- Dates
- 23-24 Sep 2013
- Place
- Fukuoka (Japan)
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 46083439
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CARBON NANOTUBES; CESIUM; ELECTRIC CONTACTS; EV RANGE; FABRICATION; IRRADIATION; N-TYPE CONDUCTORS; PLASMA; P-N JUNCTIONS; P-TYPE CONDUCTORS; SEMICONDUCTOR JUNCTIONS; THIN FILMS; TRANSISTORS
- Descriptors DEC
- ALKALI METALS; CARBON; ELECTRICAL EQUIPMENT; ELEMENTS; ENERGY RANGE; EQUIPMENT; FILMS; MATERIALS; METALS; NANOSTRUCTURES; NANOTUBES; NONMETALS; SEMICONDUCTOR DEVICES; SEMICONDUCTOR JUNCTIONS; SEMICONDUCTOR MATERIALS