Published July 2007
| Version v1
Journal article
Embedded photonic structures fabricated in photosensitive glass using proton beam writing
- 1. Centre for Ion Beam Applications, Department of Physics, National University of Singapore, 2 Science Dr 3, Singapore 117542 (Singapore)
- 2. Department of Materials Science and Engineering, National University of Singapore, 9 Engineering Dr 1, Singapore 117576 (Singapore)
Description
In this paper, we present a method that utilizes a focused beam of mega electron volt (MeV) protons to fabricate embedded photonic structures in FoturanTM glass. Both direct modification via proton beam end of range damage and post irradiation heat treatment are used to make the structures. Microfluidic channels with integrated waveguides and optical diffraction gratings are made using this technique
Additional details
Identifiers
- DOI
- 10.1016/j.nimb.2007.02.100;
- PII
- S0168-583X(07)00422-3;
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Journal Volume
- 260
- Journal Issue
- 1
- Journal Page Range
- p. 357-361
- ISSN
- 0168-583X
- CODEN
- NIMBEU
Conference
- Title
- 10. international conference on nuclear microprobe technology and application; PBW II: 2. international workshop on proton beam writing
- Acronym
- ICNMTA2006
- Dates
- 9-14 Jul 2006
- Place
- Singapore (Singapore)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 39022747
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- DAMAGE; DIFFRACTION GRATINGS; ELECTRONS; GLASS; GRATINGS; HEAT TREATMENTS; IRRADIATION; MEV RANGE; MODIFICATIONS; PROTON BEAMS; PROTONS; WAVEGUIDES
- Descriptors DEC
- BARYONS; BEAMS; ELEMENTARY PARTICLES; ENERGY RANGE; FERMIONS; HADRONS; LEPTONS; NUCLEON BEAMS; NUCLEONS; PARTICLE BEAMS
Optional Information
- Copyright
- Copyright (c) 2007 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.