Published July 2007 | Version v1
Journal article

Embedded photonic structures fabricated in photosensitive glass using proton beam writing

  • 1. Centre for Ion Beam Applications, Department of Physics, National University of Singapore, 2 Science Dr 3, Singapore 117542 (Singapore)
  • 2. Department of Materials Science and Engineering, National University of Singapore, 9 Engineering Dr 1, Singapore 117576 (Singapore)

Description

In this paper, we present a method that utilizes a focused beam of mega electron volt (MeV) protons to fabricate embedded photonic structures in FoturanTM glass. Both direct modification via proton beam end of range damage and post irradiation heat treatment are used to make the structures. Microfluidic channels with integrated waveguides and optical diffraction gratings are made using this technique

Additional details

Identifiers

DOI
10.1016/j.nimb.2007.02.100;
PII
S0168-583X(07)00422-3;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
260
Journal Issue
1
Journal Page Range
p. 357-361
ISSN
0168-583X
CODEN
NIMBEU

Conference

Title
10. international conference on nuclear microprobe technology and application; PBW II: 2. international workshop on proton beam writing
Acronym
ICNMTA2006
Dates
9-14 Jul 2006
Place
Singapore (Singapore)

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
39022747
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
DAMAGE; DIFFRACTION GRATINGS; ELECTRONS; GLASS; GRATINGS; HEAT TREATMENTS; IRRADIATION; MEV RANGE; MODIFICATIONS; PROTON BEAMS; PROTONS; WAVEGUIDES
Descriptors DEC
BARYONS; BEAMS; ELEMENTARY PARTICLES; ENERGY RANGE; FERMIONS; HADRONS; LEPTONS; NUCLEON BEAMS; NUCLEONS; PARTICLE BEAMS

Optional Information

Copyright
Copyright (c) 2007 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.