Published January 1, 2001 | Version v1
Journal article

Clusters and Planar Defects in Boron Implanted Silicon: an X-ray Diffuse Scattering Study

Description

no abstract available

Additional details

Publishing Information

Journal Title
Materials Research Society Symposia Proceedings
Journal Issue
1Jan2001issue
Journal Page Range
[10 p.]
ISSN
0272-9172

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
34009085
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
No Abstract
Descriptors DEI
ATOMIC CLUSTERS; BORON ADDITIONS; CRYSTAL DEFECTS; ION IMPLANTATION; SCATTERING; SILICON; X RADIATION
Descriptors DEC
ALLOYS; BORON ALLOYS; CRYSTAL STRUCTURE; ELECTROMAGNETIC RADIATION; ELEMENTS; IONIZING RADIATIONS; RADIATIONS; SEMIMETALS

Optional Information

Contract/Grant/Project number
AC03-76SF00515
Funding organization
USDOE Office of Science (United States)
Secondary number(s)
SLAC-REPRINT--2001-183