Published March 15, 1995 | Version v1
Journal article Metadata-only

Microstructural modifications in diamond-like carbon thin films caused by high energy ion irradiation

Creators

  • 1. Indian Inst. of Tech., Delhi (India). Thin Film Lab.
  • 2. Nuclear Science Centre, New Delhi-110 067 (India)

Description

The effect of high energy (85 MeV) nickel ions on diamond-like carbon thin films, deposited by microwave discharge of acetylene and methane gases mixed with hydrogen, has been investigated. IR, Raman and spectroscopic ellipsometry studies of irradiated and as-deposited films show large changes in their microstructural features. The effects of irradiation on films prepared from acetylene-hydrogen and methane-hydrogen gas mixtures are very different. Such a behaviour is proposed to be due to the microstructural variations in the as-deposited films. ((orig.))

Additional details

Publishing Information

Journal Title
Thin Solid Films
Journal Volume
258
Journal Issue
1-2
Journal Page Range
p. 123-127.
ISSN
0040-6090
CODEN
THSFAP

INIS

Country of Publication
Netherlands
Country of Input or Organization
Switzerland
INIS RN
26052389
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
AMORPHOUS STATE; ANNEALING; CARBON; ELECTRIC DISCHARGES; ELLIPSOMETRY; HYDROGEN; INFRARED SPECTRA; METHANE; MEV RANGE 10-100; MICROSTRUCTURE; MICROWAVE RADIATION; NICKEL IONS; PHYSICAL RADIATION EFFECTS; RAMAN SPECTRA; REFRACTIVE INDEX; THIN FILMS
Descriptors DEC
ALKANES; CHARGED PARTICLES; CRYSTAL STRUCTURE; ELECTROMAGNETIC RADIATION; ELEMENTS; ENERGY RANGE; FILMS; HEAT TREATMENTS; HYDROCARBONS; IONS; MEASURING METHODS; MEV RANGE; NONMETALS; OPTICAL PROPERTIES; ORGANIC COMPOUNDS; PHYSICAL PROPERTIES; RADIATION EFFECTS; RADIATIONS; SPECTRA