K-B microfocusing system using monolithic flexure-hinge mirrors for synchrotron X-rays

A Kirkpatrick-Baez (K-B) mirror system is designed while considering gain, efficiency, and focal spot size to theoretically achieve a spot size of 6.7x2.9 μm2 and a gain of 6.2x103 in the elliptical polarization undulator (EPU) soft X-ray beamline. This mirror system, which contains two high order polynomial corrected cylindrical mirrors (i.e., horizontal microfocusing mirror, HMFM, and vertical microfocusing mirror, VMFM) with a monolithic flexure-hinge design, can collect and microfocus the undulator source into a nearly perfect point image. To ensure that the mirrors are easily mounted and adjusted, a modular system on a rotatable CF flange is designed to independently motorize each mirror with four degrees of freedom