An apparatus for measurements of positive and negative secondary ion emission of conducting and isolating samples

An apparatus is described for SIMS measurements from conducting and non-conducting targets in the medium energy range with primary ions of noble gas and oxygen. The compensation of the surface charges was carried out by electrons. The equipment makes possible investigations of positive and negative secondary ion emission, of the energy distributions and the total secondary ion yield. The primary ion density goes from 10-10 to 10-4 A/cm2. (author)