Analysis of surfaces and thin films

The aim of this review is to provide a guide for the occasional user or would-be user to the readily available and best-documented techniques that have been used or may be used to supplement the data from other experimental methods. The following types of technique are described: techniques utilizing an incident beam of electrons; techniques utilizing an incident beam of ions; techniques utilizing an incident beam of photons. Acoustic microscopy and spark source mass spectrometry are also mentioned. (Auth.)