Published May 1, 1984 | Version v1
Patent

Compact plug connectable ion source

Description

A compact ion source plug connected to a socket is provided. The source uses a magnetic pole piece which includes a center pole piece and a surrounding circumferential pole piece to form an arcuate fringe field. Cathode elements and anode elements are located within the fringe field for producing a plasma. A source body terminates at one end with at least one grid and forms a plasma chamber with a base member. All of the electrical connections to the plasma generator and the gas connection are through a plug formed on the opposite side of the base member

Availability note (English)

U.S. Commissioner of Patents, Washington, D.C. 20231, USA, $.50.

Additional details

Publishing Information

Imprint Pagination
v p.
IPC:
Int. Cl. H01J 07/24.
IPC
Int. Cl. H01J 07/24.
Patent number
US patent document 4,446,403/A/

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
16045977
Subject category
S42: ENGINEERING;
Resource subtype / Literary indicator
Non-conventional Literature
Descriptors DEI
ANODES; CATHODES; CLOSURES; COATINGS; DEPOSITION; ELECTRIC CONTACTS; ELECTRONIC CIRCUITS; FABRICATION; GRIDS; ION BEAMS; ION SOURCES; PLASMA PRODUCTION; SPECIFICATIONS; SPUTTERING; SUBSTRATES
Descriptors DEC
BEAMS; ELECTRICAL EQUIPMENT; ELECTRODES; EQUIPMENT

Optional Information

Notes
PAT-APPL-382266.