Published May 1, 1984
| Version v1
Patent
Compact plug connectable ion source
Creators
Description
A compact ion source plug connected to a socket is provided. The source uses a magnetic pole piece which includes a center pole piece and a surrounding circumferential pole piece to form an arcuate fringe field. Cathode elements and anode elements are located within the fringe field for producing a plasma. A source body terminates at one end with at least one grid and forms a plasma chamber with a base member. All of the electrical connections to the plasma generator and the gas connection are through a plug formed on the opposite side of the base member
Availability note (English)
U.S. Commissioner of Patents, Washington, D.C. 20231, USA, $.50.Additional details
Publishing Information
- Imprint Pagination
- v p.
- IPC:
- Int. Cl. H01J 07/24.
- IPC
- Int. Cl. H01J 07/24.
- Patent number
- US patent document 4,446,403/A/
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 16045977
- Subject category
- S42: ENGINEERING;
- Resource subtype / Literary indicator
- Non-conventional Literature
- Descriptors DEI
- ANODES; CATHODES; CLOSURES; COATINGS; DEPOSITION; ELECTRIC CONTACTS; ELECTRONIC CIRCUITS; FABRICATION; GRIDS; ION BEAMS; ION SOURCES; PLASMA PRODUCTION; SPECIFICATIONS; SPUTTERING; SUBSTRATES
- Descriptors DEC
- BEAMS; ELECTRICAL EQUIPMENT; ELECTRODES; EQUIPMENT
Optional Information
- Notes
- PAT-APPL-382266.