Analytic approach to the computation of the temperature distribution in multilayer structures under heating by cw scanning laser radiation

By using integral transform methods, an approach was developed to the solution of a problem on the temperature distribution in multilayer structures heated by continuous wave scanning laser radiation, with phase transitions in the layers taken into account. Temperature distribution was described by a system of nonlinear inhomogeneous partial differential equations. The approach was tested against experimental data for two-layered Si/SiO2 structures for different scanning rates