Published July 1992 | Version v1
Journal article

Systematization of data on preferential sputtering

Description

On the basis of correlation between elements bonding and atoms dumbbels migration energies the systematization of several alloys is carried out. The leading factors of preferentional sputtering of elements from the alloys are lattice type and difference between bonding energies of elements

Additional details

Additional titles

Original title (Russian)
Систематизация данных по избирательному распылению

Publishing Information

Journal Title
Fizika i Khimiya Obrabotki Materialov
Journal Issue
no.4
Journal Page Range
p. 59-63.
ISSN
0015-3214
CODEN
FKOMAT