Published 1995 | Version v1
Miscellaneous Open

Quantum-theoretical modelling and interpretation of the beam damage in ion implanted PMMA

  • 1. Deutsche Bundespost Telekom, Darmstadt, (Germany)
  • 2. Heidelberg Univ. (Germany)
  • 3. Institut fur Halbleitertechnik, Darmstadt, (Germany)

Description

Short communication

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Part of:
Ninth international conference on ion beam modification of materials. Book of abstracts

Additional details

Publishing Information

Publisher
Accademic Press.
Imprint Title
Ninth international conference on ion beam modification of materials. Book of abstracts
Imprint Pagination
452 p.
Journal Page Range
p. 7058.
Report number
INIS-AU--0004

Conference

Title
9. international conference on ion beam modification of materials.
Acronym
IBMM'95
Dates
5-10 Feb 1995.
Place
Canberra (Australia).

Optional Information