Layer by layer analysis of solids by transit time mass spectrometer with laser ion source

Methods have been developed for multilayer mass-spectrometric analysis of heavy substances (V, Fe, Zr, Mo, Cf) based on the use of a time-of-flight spectrometer in conjunction with a laser operating under giant pulse conditions. It is shown that in the laser probe method the spatial resolution in depth is better than 0.5 μm for many substances. The paper discusses the use of a laser ion source for the semiquantitative determination of oxygen physically sorbed on the surface of semiconductors. (author)