Published February 15, 1979 | Version v1
Patent Open

Tempering chamber for preparation of atomically pure surfaces

Creators

Description

The chamber consists of two telescopically arranged tubes. The fixed tube is provided with a piezoelectric resonator for evaporated particle display. A thermocouple is flexibly attached to the movable tube which, when the tube is slipped on a rotary manipulator with the sample, is in flexible contact with the sample surface. The movable tube is supported with an arm operated through a rotary bushing in the wall of the vacuum chamber recipient. The axes of analysis systems (coaxial Auger analyzer, LEED optics) and the tempering chamber axis lie in the plane of the sample to be studied. (H.S.)

Files

11556289.pdf

Files (182.4 kB)

Name Size Download all
md5:6f8f754bf848ea8432d57fa62f2030ca
182.4 kB Preview Download

Additional details

Additional titles

Original title (Czech)
Temperacni komora pro pripravu atomarne cistych povrchu

Publishing Information

Imprint Pagination
5 p.
IPC:
Int. Cl. C23C11/00.
IPC
Int. Cl. C23C11/00.
Patent number
CS patent document 176943/B/