Published February 15, 1979
| Version v1
Patent
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Tempering chamber for preparation of atomically pure surfaces
Creators
Description
The chamber consists of two telescopically arranged tubes. The fixed tube is provided with a piezoelectric resonator for evaporated particle display. A thermocouple is flexibly attached to the movable tube which, when the tube is slipped on a rotary manipulator with the sample, is in flexible contact with the sample surface. The movable tube is supported with an arm operated through a rotary bushing in the wall of the vacuum chamber recipient. The axes of analysis systems (coaxial Auger analyzer, LEED optics) and the tempering chamber axis lie in the plane of the sample to be studied. (H.S.)
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Additional details
Additional titles
- Original title (Czech)
- Temperacni komora pro pripravu atomarne cistych povrchu
Publishing Information
- Imprint Pagination
- 5 p.
- IPC:
- Int. Cl. C23C11/00.
- IPC
- Int. Cl. C23C11/00.
- Patent number
- CS patent document 176943/B/
INIS
- Country of Publication
- Serbia and Montenegro
- Country of Input or Organization
- Serbia and Montenegro
- INIS RN
- 11556289
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- AUGER ELECTRON SPECTROSCOPY; ELECTRON DIFFRACTION; SAMPLE PREPARATION; SURFACE CLEANING; TEMPERING; TUBES; VACUUM SYSTEMS
- Descriptors DEC
- CLEANING; COHERENT SCATTERING; DIFFRACTION; ELECTRON SPECTROSCOPY; HEAT TREATMENTS; SCATTERING; SPECTROSCOPY; SURFACE FINISHING