Published March 2007
| Version v1
Journal article
Development of doubly-curved-crystal for focusing of X-rays to micron area
Creators
- 1. Osaka Electro-Communication Univ., Neyagawa, Osaka (Japan)
- 2. Ayumi Industry Co., Ltd., Himeji, Hyogo (Japan)
Description
Doubly-Curved-Crystal (DCC) for monochromatization and focusing of X-rays, is necessary for the qualitative and quantitative analysis of sub-micron particle by XRF. Si wafers were bent in the suitable curvature for the two directions which cross each other at right angle, and then they were bonded with the bases by different methods, adhesive and anodic bonding. Those DCCs are compared in three dimensional measurements of curved plane, and monochromatization and focusing of X-rays. The focal point size of DCC bonded by anodic bonding, is about 20 μm, which is less than that bonded by the adhesive method. (author)
Additional details
Publishing Information
- Journal Title
- X-sen Bunseki No Shinpo
- Journal Volume
- 38
- Journal Page Range
- p. 155-164
- ISSN
- 0911-7806
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 39087389
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Descriptors DEI
- ADHESIVES; ANODES; BONDING; CRYSTALS; ENERGY SPECTRA; FOCUSING; MONOCHROMATIC RADIATION; PARTICLES; SILICON; X RADIATION; X-RAY FLUORESCENCE ANALYSIS
- Descriptors DEC
- CHEMICAL ANALYSIS; ELECTRODES; ELECTROMAGNETIC RADIATION; ELEMENTS; FABRICATION; IONIZING RADIATIONS; JOINING; NONDESTRUCTIVE ANALYSIS; RADIATIONS; SEMIMETALS; SPECTRA; X-RAY EMISSION ANALYSIS
Optional Information
- Notes
- 5 refs., 11 figs., 1 tab.