Published 1987 | Version v1
Book

Ion ranges and energy deposition in insulators

  • 1. Hahn-Meitner-Institut fuer Kernforschung Berlin G.m.b.H. (Germany, F.R.)

Description

This chapter describes the general aspects of energy deposits in solids: (a) the particular effects in ionic crystals, (b) electronic energy loss in insulators and influence of this effect on other properties, e.g. damage, sputtering, etchable tracks and photoresists; (c) calculations of depth distributions for particular ions and targets. 62 refs.; 31 figs.; 2 tabs

Additional details

Additional titles

Subtitle (English)
Chapter 1

Publishing Information

Publisher
Elsevier.
Imprint Place
Amsterdam (Netherlands)
ISBN
0-444-42816-X
Imprint Title
Ion beam modification of insulators
Imprint Pagination
765 p.
Journal Volume
2
Series
Beam Modification of Materials.
Journal Page Range
p. 1-56.

Optional Information

Notes
Imprint:Includes subject index; refs.; figs.; tabs.