Published 1987
| Version v1
Book
Ion ranges and energy deposition in insulators
Creators
- 1. Hahn-Meitner-Institut fuer Kernforschung Berlin G.m.b.H. (Germany, F.R.)
Description
This chapter describes the general aspects of energy deposits in solids: (a) the particular effects in ionic crystals, (b) electronic energy loss in insulators and influence of this effect on other properties, e.g. damage, sputtering, etchable tracks and photoresists; (c) calculations of depth distributions for particular ions and targets. 62 refs.; 31 figs.; 2 tabs
Additional details
Additional titles
- Subtitle (English)
- Chapter 1
Publishing Information
- Publisher
- Elsevier.
- Imprint Place
- Amsterdam (Netherlands)
- ISBN
- 0-444-42816-X
- Imprint Title
- Ion beam modification of insulators
- Imprint Pagination
- 765 p.
- Journal Volume
- 2
- Series
- Beam Modification of Materials.
- Journal Page Range
- p. 1-56.
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 19000319
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ABSORPTION; DEPTH; ELECTRICAL INSULATORS; ENERGY DEPOSITION; ION BEAMS; ION COLLISIONS; IONIC CRYSTALS; IONS; PHYSICAL RADIATION EFFECTS; RANGE; SPATIAL DISTRIBUTION; SPUTTERING
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; COLLISIONS; CRYSTALS; DIMENSIONS; DISTRIBUTION; ELECTRICAL EQUIPMENT; EQUIPMENT; RADIATION EFFECTS
Optional Information
- Notes
- Imprint:Includes subject index; refs.; figs.; tabs.