Published June 1, 2016 | Version v1
Journal article

Graphene: the ultimately thin sputtering shield

  • 1. II. Physikalisches Institut, Universität zu Köln, D-50937 Köln (Germany)

Description

Scanning tunneling microscopy methods are applied to investigate the potential of monolayer graphene as a sputtering shield for the underlying metal substrate. To visualize the effect, a bare and a graphene protected Ir(111) surface are irradiated with 500 eV Xe+, as well as 200 eV Xe+ and Ar+ ions, all at 1000 K. By quantitatively evaluating the sputtered material from the surface vacancy island area, we find a drastic decrease in metal sputtering for the graphene protected surface. It is demonstrated that efficient sputter protection relies on self-repair of the ion damage in graphene, which takes place efficiently in the temperature range of chemical vapor deposition growth. Based on the generality of the underlying principles of ion damage, graphene self-repair, and graphene growth, we speculate that efficient sputter protection is possible for a broad range of metals and alloys. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/2053-1583/3/2/025032

Additional details

Identifiers

Publishing Information

Journal Title
2D Materials
Journal Volume
3
Journal Issue
2
Journal Page Range
[5 p.]
ISSN
2053-1583

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
50045080
Subject category
S77: NANOSCIENCE AND NANOTECHNOLOGY;
Descriptors DEI
ALLOYS; ARGON IONS; CHEMICAL VAPOR DEPOSITION; EV RANGE 100-1000; GRAPHENE; ION BEAMS; METALS; SAFETY; SCANNING TUNNELING MICROSCOPY; SPUTTERING; SUBSTRATES; SURFACES; XENON IONS
Descriptors DEC
BEAMS; CARBON; CHARGED PARTICLES; CHEMICAL COATING; DEPOSITION; ELEMENTS; ENERGY RANGE; EV RANGE; IONS; MICROSCOPY; NONMETALS; SURFACE COATING