Variations of plasma parameters and sheath thickness due to the extraction of ion and electron flux in a double plasma device

Influence of charged particle extraction on plasma parameters and on ion sheath has been investigated in a double plasma device. When ions are extracted from the plasma, the plasma density as well as the positive ion flux into the sheath increases. As a result a sheath contraction takes place. Again, in case of electron extraction, it is found that the plasma density as well as the positive ion flux into the sheath decreases. As a result a sheath expansion takes place. Furthermore, it is observed that the floating potential of a plate can be controlled by extracting charged particles from the plasma. (copyright 2008 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim) (orig.)