Published 1995
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Implant isolation in n-type InP implanted with low and high energy He+ and B+
Description
Short communication
Files
28072878.pdf
Files
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Additional details
Publishing Information
- Publisher
- Accademic Press.
- Imprint Title
- Ninth international conference on ion beam modification of materials. Book of abstracts
- Imprint Pagination
- 452 p.
- Journal Page Range
- p. 10073.
- Report number
- INIS-AU--0004
Conference
- Title
- 9. international conference on ion beam modification of materials.
- Acronym
- IBMM'95
- Dates
- 5-10 Feb 1995.
- Place
- Canberra (Australia).
INIS
- Country of Publication
- Australia
- Country of Input or Organization
- Australia
- INIS RN
- 28072878
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- BORON IONS; CRYSTAL DEFECTS; ELECTRIC CONDUCTIVITY; HELIUM IONS; INDIUM PHOSPHIDES; ION IMPLANTATION; KEV RANGE 10-100; PHYSICAL RADIATION EFFECTS
- Descriptors DEC
- CHARGED PARTICLES; CRYSTAL STRUCTURE; ELECTRICAL PROPERTIES; ENERGY RANGE; INDIUM COMPOUNDS; IONS; KEV RANGE; PHOSPHIDES; PHOSPHORUS COMPOUNDS; PHYSICAL PROPERTIES; PNICTIDES; RADIATION EFFECTS