Published December 1995 | Version v1
Journal article

Influence of weak laser irradiation on oxide formation in thin titanium films on thermal annealing

Description

The paper presents an investigation into phase process occurring in titanium thin films under annealing and simultaneous laser impact with λ = 312.5; 365.0; 552.0 nm. It is shown that the application of laser radiation with λ = 312.5 and 552.0 mn stimulates the formation of oxides in the films while that with λ = 365.0 suppresses the formation. 6 refs., 1 fig., 2 tabs

Additional details

Additional titles

Original title (Russian)
Влияние слабого лазерного облучения на оксидообразование в тонких пленка х титана при термическом отжиге

Publishing Information

Journal Title
Izvestiya Akademii Nauk. Seriya Fizicheskaya
Journal Volume
59
Journal Issue
12
Journal Page Range
p. 151-155.
ISSN
0367-6765
CODEN
IRAFEO

Conference

Title
15. International Conference on Coherent and Nonlinear Optics; 8. International Conference 'Laser Optics'.
Original Conference Title
15. Mezhdunarodnaya konferentsiya po kogerentnoj i nelinejnoj optike
Dates
27 Jun - 1 Jul 1995.
Place
St. Petersburg (Russian Federation).

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
27055513
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ANNEALING; GRAIN SIZE; LASER RADIATION; OXIDATION; PHASE STUDIES; POLYCRYSTALS; TEMPERATURE DEPENDENCE; TEMPERATURE RANGE 0400-1000 K; THIN FILMS; TIME DEPENDENCE; TITANIUM
Descriptors DEC
CHEMICAL REACTIONS; CRYSTAL STRUCTURE; CRYSTALS; ELECTROMAGNETIC RADIATION; ELEMENTS; FILMS; HEAT TREATMENTS; METALS; MICROSTRUCTURE; RADIATIONS; SIZE; TEMPERATURE RANGE; TRANSITION ELEMENTS