Published 1989 | Version v1
Book Metadata-only

Techniques and equipment

Creators

  • 1. Div. of Applied Physics, SIRO, Menai (Australia)

Description

This paper discusses major components of an ion beam analysis facility. Typical beam requirements are summarized. Focusing, scanning, and imaging functions are described

Additional details

Publishing Information

Publisher
Academic Press Inc.
Imprint Place
San Diego, CA (USA)
ISBN
0-12-099740-1
Imprint Title
Ion beams for materials analysis
Imprint Pagination
719 p.
Journal Page Range
p. 47-102.

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
22004804
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
Descriptors DEI
FOCUSING; IMAGE PROCESSING; ION MICROPROBE ANALYSIS; ION MICROSCOPES; ION MICROSCOPY; ION PROBES; SPECIFICATIONS
Descriptors DEC
CHEMICAL ANALYSIS; MICROANALYSIS; MICROSCOPES; MICROSCOPY; NONDESTRUCTIVE ANALYSIS; PROBES