Published August 1993
| Version v1
Journal article
New principle of feeding for flash evaporation MOCVD devices
Description
A novel scheme of flash evaporation feeding for MOCVD processes of multi-component oxide films deposition is proposed. The scheme comprises 1) microdozage of organic solution of solid volatile precursors on the glass fiber belt, 2) evaporation of the solvent and 3) flash evaporation of MOC microdoses from the belt. The functioning of the designed feeder is described and the features of proposed scheme in comparison to existing feeding principles are discussed. (orig.)
Additional details
Publishing Information
- Journal Title
- Journal de Physique 4. Colloque
- Journal Volume
- 3
- Journal Issue
- 3
- Journal Page Range
- p. 375-378.
- ISSN
- 1155-4339
- CODEN
- JPICEI
Conference
- Title
- 9. international conference on chemical vapour deposition (Euro CVD-9).
- Dates
- 22-27 Aug 1993.
- Place
- Tampere (Finland).
INIS
- Country of Publication
- France
- Country of Input or Organization
- France
- INIS RN
- 25021254
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- BARIUM OXIDES; COPPER OXIDES; ELECTRIC CONDUCTIVITY; EVAPORATION; FILMS; GLASS; HIGH-TC SUPERCONDUCTORS; ORGANOMETALLIC COMPOUNDS; OXIDES; SOLID SOLUTIONS; THIN FILMS; YTTRIUM OXIDES
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; CHALCOGENIDES; COPPER COMPOUNDS; DISPERSIONS; ELECTRICAL PROPERTIES; HOMOGENEOUS MIXTURES; MIXTURES; ORGANIC COMPOUNDS; OXYGEN COMPOUNDS; PHASE TRANSFORMATIONS; PHYSICAL PROPERTIES; SOLUTIONS; SUPERCONDUCTORS; TRANSITION ELEMENT COMPOUNDS; YTTRIUM COMPOUNDS