Published May 2018
| Version v1
Journal article
Development of a high-resolution elastic recoil detection analysis (HERDA) system with a multi-channel semiconductor detector
Creators
- 1. Tokyo University, School of Engineering, Tokyo (Japan)
- 2. University of Tsukuba, Institute of Applied Physics, Tsukuba, Ibaraki (Japan)
- 3. Okinawa Institute of Science and Technology Graduate University (OIST), Onna, Okinawa (Japan)
Description
High-resolution Elastic Recoil Detection Analysis (HERDA) is one of the ion beam analysis methods and can obtain depth distribution of Hydrogen in some sample with the resolution of sub-nm. The high depth resolution and good quantitative valuation are the advantages of HERDA, however, the limit of detection (LOD) is not enough for the analysis of an oxide film like MOSFET. For the improvement of LOD of HERDA, we have developed a new HERDA system using a multi-channel semiconductor detector. (author)
Additional details
Additional titles
- Original title (Japanese)
- 多チャンネル半導体検出器を用いた高分解能ERDAの開発
Publishing Information
- Journal Title
- Hoshasen
- Journal Volume
- 44
- Journal Issue
- 1
- Series
- 雑誌名:放射線
- Journal Page Range
- p. 23-27
- ISSN
- 0285-3604
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 49083276
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Descriptors DEI
- BEAM ANALYZERS; DARK CURRENT; ENERGY RESOLUTION; FIELD EFFECT TRANSISTORS; ION BEAMS; IONS; MAGNETIC FIELDS; NUCLEAR REACTION ANALYSIS; POSITION SENSITIVE DETECTORS; RECOILS; SENSITIVITY; SI SEMICONDUCTOR DETECTORS; STOPPING POWER; X-RAY EMISSION ANALYSIS
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; CHEMICAL ANALYSIS; CURRENTS; ELECTRIC CURRENTS; LEAKAGE CURRENT; MEASURING INSTRUMENTS; NONDESTRUCTIVE ANALYSIS; RADIATION DETECTORS; RESOLUTION; SEMICONDUCTOR DETECTORS; SEMICONDUCTOR DEVICES; TRANSISTORS
Optional Information
- Notes
- 7 refs., 7 figs.