Published December 1, 2011 | Version v1
Journal article

Oxidation temperature dependent properties of MgO thin film on alumina

  • 1. Thick and Thin Film Device Lab, Department of Physics, Shivaji University, Kolhapur, 416004 (India)

Description

The magnesium oxide thin films were prepared by thermal oxidation (in air) of vacuum evaporated magnesium thin film on alumina. It was found that oxidation temperature (623 K, 675 K and 723 K) and thickness (103 nm and 546 nm) dependent effects were prominently manifested in the surface morphology. Electrical and microwave properties (8-12 GHz) of the MgO thin films were also carried out. X-ray diffraction showed orientation along (2 0 0) and (2 2 0) directions. Flowerlike morphology was observed from SEM and flake like morphology for films of higher thickness oxidized at higher temperatures. The magnesium oxide thin film showed NTC behavior. Microwave transmittance was found to increase with increase in oxidation temperature but was lower than alumina. Frequency and oxidation temperature dependent microwave permittivity was obtained. The microwave dielectric constant varied in the range 8.3-15.3.

Availability note (English)

Available from http://dx.doi.org/10.1016/j.apsusc.2011.09.126

Additional details

Identifiers

DOI
10.1016/j.apsusc.2011.09.126;
PII
S0169-4332(11)01529-7;

Publishing Information

Journal Title
Applied Surface Science
Journal Volume
258
Journal Issue
4
Journal Page Range
p. 1535-1540
ISSN
0169-4332
CODEN
ASUSEE

Optional Information

Copyright
Copyright (c) 2011 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.