Published October 26, 1993
| Version v1
Patent
Microelectronic superconducting device with multi-layer contact
Description
A microelectronic component comprising a crossover is provided comprising a substrate, a first high Tc superconductor thin film, a second insulating thin film comprising SrTiO3; and a third high Tc superconducting film which has strips which crossover one or more areas of the first superconductor film. An in situ method for depositing all three films on a substrate is provided which does not require annealing steps. The photolithographic process is used to separately pattern the high Tc superconductor thin films. 14 figures
Availability note (English)
Available from Patent and Trademark Office, Box 9, Washington, DC 20232 (United States).Additional details
Publishing Information
- Imprint Pagination
- [10 p.].
- IPC:
- Int. Cl. H01L 39/22; B05D 5/12; H01B 12/00.
- IPC
- Int. Cl. H01L 39/22; B05D 5/12; H01B 12/00.
- Patent number
- US patent document 5,256,636/A/
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 25077072
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Non-conventional Literature
- Descriptors DEI
- DESIGN; FABRICATION; HIGH-TC SUPERCONDUCTORS; MASKING; MICROELECTRONIC CIRCUITS; STRONTIUM TITANATES; SUPERCONDUCTING DEVICES; SUPERCONDUCTING FILMS
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; ELECTRONIC CIRCUITS; FILMS; OXYGEN COMPOUNDS; STRONTIUM COMPOUNDS; SUPERCONDUCTORS; TITANATES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Secondary number(s)
- US patent application 7-586,435.