Properties of AlN coating received by vacuum-arc method on silicon

AlN coating is received by the method of the vacuum-arc deposition on silicon substrate. It is shown with the use of raster ion-electronic microscopy that coating of nitride aluminum has a wavy structure. It is shown by the method of scanning probe microscopy (SPM) that AlN has a polycrystalline surface with the sizes of grains of approximately 50-100 nm, the height of nanoledges arrives at 8 nm, the degree of roughness makes 1.3 nm. It is determined that the inductivity of AlN coating reduces from 11.5 to 2.94 with increasing of frequency from 50 Hz to 1 MHz. The peak of the dielectric loss tangent observed at 10 kHz arriving 0.39.