Published July 1982 | Version v1
Journal article Metadata-only

Structure of molybdenum plasma sputtered coating

Creators

Description

Formation pecutiarities of molybdenum coating structure obtained at different condensation modes of molybdenum plasma on plates of VN2AEh niobium alloy are investigated. The structure of a plasma-coating is shown to essentially depend on energy flow density, substrate temperature and time of coating deposition. Choice of deposition conditions should be executed depending on the coating

Additional details

Additional titles

Original title (Russian)
Структура молибденового плазмоконденсатного покрытия

Publishing Information

Journal Title
Fiz. Khim. Obrab. Mater.
Journal Issue
no.4
Series
Fiz. Khim. Obrab. Mater.
ISSN
0015-3214

INIS

Country of Publication
Russian Federation
Country of Input or Organization
USSR
INIS RN
14754180
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
COATINGS; ENERGY DENSITY; ENERGY DEPENDENCE; HIGH TEMPERATURE; MICROHARDNESS; MICROSTRUCTURE; MOLYBDENUM; PLASMA; SUBSTRATES; TEMPERATURE DEPENDENCE; TIME DEPENDENCE; VACUUM COATING
Descriptors DEC
CRYSTAL STRUCTURE; DEPOSITION; ELEMENTS; HARDNESS; MECHANICAL PROPERTIES; METALS; SURFACE COATING; TRANSITION ELEMENTS