Published September 1987 | Version v1
Journal article

Plasma polymerization of hexamethyldisilazane and octamethylcyclotetrasiloxane

  • 1. Academia Sinica, Changchun, JL (China). Changchun Inst. of Applied Chemistry

Description

In a capacitively coupled discharge with external electrodes, hexamet-hyldisilazane and octamethylcyclotetrasiloxane were polymerized, and the effects of system pressure, discharge power and plasma gas on the polymerization rate were studied. The polymer structure was studied through IR spectroscopy, X-ray diffraction and solubility measurements, and some properties of the polymer such as thermostability, solvent resistence, hydrophobicity, density and refrective index were also determined

Additional details

Publishing Information

Journal Title
J. Radiat. Res. Radiat. Process.
Journal Volume
5
Journal Issue
1
Series
J. Radiat. Res. Radiat. Process.
Journal Page Range
27-32
ISSN
1000-3436
CODEN
FYYXE