Cavity optoelectromechanical system combining strong electrical actuation with ultrasensitive transduction

A cavity optoelectromechanical system is reported which combines the ultrasensitive transduction of cavity optomechanical systems with the electrical actuation of nanoelectromechanical systems. Ultrasensitive mechanical transduction is achieved via optomechanical coupling. Electrical gradient forces as large as 0.40 μN are realized, facilitating strong actuation with ultralow dissipation. A scanning probe microscope is implemented, capable of characterizing the mechanical modes. The integration of electrical actuation into optomechanical devices is an enabling step toward the regime of quantum nonlinear dynamics and provides capabilities for quantum control of mechanical motion.