Thermal stability of boron nitride/silicon p-n heterojunction diodes
- 1. Department of Applied Science for Electronics and Materials, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580 (Japan)
- 2. Exploratory Materials Research Laboratory for Energy and Environment, National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047 (Japan)
Description
Heterojunctions of p-type cubic boron nitride (cBN) and n-type silicon with sp2-bonded BN (sp2BN) interlayers are fabricated under low-energy ion impact by plasma-enhanced chemical vapor deposition, and their rectification properties are studied at temperatures up to 573 K. The rectification ratio is increased up to the order of 105 at room temperature by optimizing the thickness of the sp2BN interlayer and the cBN fraction for suppressing the reverse leakage current. A highly rectifying p-type cBN/thick sp2BN/n-type silicon junction diode shows irreversible rectification properties mainly characterized by a marked decrease in reverse current by an order of magnitude in an initial temperature ramp/down cycle. This irreversible behavior is much more reduced by conducting the cycle twice or more. The temperature-dependent properties confirm an overall increase in effective barrier heights for carrier injection and conduction by biasing at high temperatures, which consequently increases the thermal stability of the diode performance
Additional details
Identifiers
- DOI
- 10.1063/1.4932640;
Publishing Information
- Journal Title
- Journal of Applied Physics
- Journal Volume
- 118
- Journal Issue
- 15
- Journal Page Range
- p. 155102-155102.7
- ISSN
- 0021-8979
- CODEN
- JAPIAU
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 47062965
- Subject category
- S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Descriptors DEI
- BORON NITRIDES; CARRIERS; CHEMICAL VAPOR DEPOSITION; HETEROJUNCTIONS; JUNCTION DIODES; LEAKAGE CURRENT; OPTIMIZATION; PERFORMANCE; SILICON; TEMPERATURE DEPENDENCE; TEMPERATURE RANGE 0273-0400 K
- Descriptors DEC
- BORON COMPOUNDS; CHEMICAL COATING; CURRENTS; DEPOSITION; ELECTRIC CURRENTS; ELEMENTS; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; SEMICONDUCTOR DEVICES; SEMICONDUCTOR DIODES; SEMICONDUCTOR JUNCTIONS; SEMIMETALS; SURFACE COATING; TEMPERATURE RANGE
Optional Information
- Notes
- (c) 2015 AIP Publishing LLC