Perforated diode neutron detector modules fabricated from high-purity silicon

Compact neutron detectors are being designed and tested for use as low-power real-time personnel dosimeters. The neutron detectors are pin diodes that are mass produced from high-purity Si wafers. Each detector has thousands of circular perforations etched vertically into the device. The perforations are backfilled with 6LiF to make the pin diodes sensitive to thermal neutrons. The prototype devices deliver 4.7% thermal neutron detection efficiency while operating on only 15 V, showing a 9% increase in efficiency over identical planar devices.